APS

The Auto Pitch Sensor is a wafer-shaped instrument that rides in a cassette the same way a production wafer does. It reports slot pitch and how the wafer sits in the pocket, so a handler teach that has drifted can be named in millimetres instead of in the language of “it looks high.” The unit is meant for the setup window between lots, not for a laboratory booking.

A typical pass is simple: load the APS into the cassette, run the same pick-and-place path used on the tool, and read the pitch trace. If a slot is tight or a wafer is riding on the tooth, the next teach or the next cassette change is a known correction. The sensor is wireless so the chamber door does not need a cable feedthrough for this check.

Keep the APS on the same robot recipe as production stock. A special “metrology path” will measure a machine that the lot never sees. After the trace is stored, the next cassette lot can be compared against it instead of against memory. Leveling of stages and end-effectors is a separate check: use the ALS / ALSR drawing for envelope and keep-out.

Family	WaferSense
Model	APS — Auto Pitch Sensor
Job	Cassette slot pitch and wafer seating
Form	Wafer-shaped wireless instrument
Path	Same pick-and-place recipe as production
Use	Handler and cassette setup on the shift

Desk Request APS

Quote, matching, or a setup question for this instrument.