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WaferSense

Each WaferSense unit is built as a wafer so it can travel on the same robot path as production stock. The technician reads level or pitch from outside the tool, then turns jack screws or teaches the handler against a number instead of against a guess. APS measures cassette pitch. ALS / ALSR is the leveling pair.

Wafer-shaped sensor seated in a cassette

APS

Auto Pitch Sensor

Measures slot pitch and wafer seating in a cassette so the handler teach can be corrected on the same shift.

ALS / ALSR · files

Auto Leveling Sensor

Leveling pair for stages and end-effectors. Dimensional drawing for envelope and keep-out.