WaferSense™ ALS and ALSR
ALS150, ALS200, ALS200A, ALS300, ALS300A, ALSR
Our dedicated team of support engineers is here to answer your specific product and application questions.
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| Manuals & Guides | ||
(1,070 KB) |
WaferSense ALS & ALSR User's Guide (Feb 2006) |
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| (426 KB) |
WaferSense ALS cleanroom card deck (Jul 2007) | |
(1317 KB) |
WaferSense ALS cleanroom card deck (Jul 2007) - 10-up for printing on letter-sized perforated business card page | |
| Complete ALS Distribution Disk with Drivers | ||
(5.92 MB) |
Updated CD with latest drivers and User's Guide (Mar 2008) Ver:2.00.001 (ReadMe) |
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| Application Notes | ||
(50 KB) |
ALS AMAT Endura2-Centura2 App Note (Sept 2005) |
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(50 KB) |
ALS AMAT Endura-Centura App Note (Sept 2005) |
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(168 KB) |
ALS Mattson SHS App Note (Sept 2005) |
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(50 KB) |
ALS TELAct8 App Note (Sept 2005) |
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| Case Studies | ||
(1.3 MB) |
Solving Semiconductor Equipment Leveling Problems and Establishing Process Uniformity Standards (Jun 2006) |
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| Release Notes | ||
(106 KB) |
ALS1.1 Release Notes (Feb 2006) |
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| Dimensional Drawings | ||
(129 KB) |
ALS150 Drawing (Feb 2006) |
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(133 KB) |
ALS200 Drawing (Feb 2006) |
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(537 KB) |
ALS300 Drawing (Feb 2006) |
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