Wafer Mapping Sensors EX-Q & EX-QS

Wafer Mapping EX-Q and EX-QS

EX-43Q, EX-73Q, EX-83Q, EX-93Q, EX-43QS and EX-73QS

Our dedicated team of support engineers is here to answer your specific product and application questions.

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Important Note:
EX-Q wafer mapping sensors were released in June 2003 and are able to replace most legacy and discontinued sensors. The EX-Q has the same mechanical footprint, electrical interface and digital output as EX and WX sensors. For specific questions regarding upgrading to EX-Q wafer mapping sensors, please contact technical support. The EX-QS was released in September 2005 and is the performance equivalent of the EX-Q in a smaller package.

CyberOptics Semiconductor offers an Alignment Card that is designed to take the guesswork out of setup. It allows users to quickly and accurately verify working angles and standoff distance in order to ensure optimum wafer detection performance. Contact technical support to receive a free Alignment Card.

Manuals & Guides

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(300 KB)

EX-Q Instructions for Installation and Use (Jun 2004)

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(300 KB)

EX-QS Instructions for Installation and Use (Sept. 2005)

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(180 KB)

Alignment Card Instructions (Jun 2004)

Tech Notes

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(40 KB)

EX-Q Reteaching Guide (Apr 2004)

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(70 KB)

EX-Q Alignment & Standoff Distances (Jun 2004)

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(520 KB)

Dropout Filter Tech Note (Mar 2003)