WaferSense ALS2

Wireless, wafer-like leveling inclinometer for real-time, accurate measurements previously out of reach.

WaferSense™ ALS2 moves through your semiconductor process equipment to take critical 2D level measurements. Wafer-like, it is compatible with your existing automation, while its wireless communication provides real-time, accurate data to speed your tool setup and maintenance. This data can also be logged, so you can define your equipment’s optimal setup.

Features

• 200 mm notch or flat, or 300 mm wafer-like form factors optimize equipment setup.
  
• Objective and reproducible measurement information can be saved manually or automatically to enhance process uniformity.
• LevelView graphical user interface collects and displays inclination data wirelessly, letting you see the effect of your adjustments in real time, speeding equipment alignment and returning it to productive use faster.
  
• Improved equipment setup increases yield.