WaferSense™ Auto Leveling System
Wireless and Wafer-like Inclinometers
Time to Put Away Your Bubble Levels. Our Automated Leveling Wafers Save you Valuable Time and Provides More Reliable Results.
Each ALS model is a wireless precision instrument that handles like a wafer to easily capture the inclination of previously out-of-reach semiconductor process equipment. Unlike traditional methods, WaferSense ALS doesn't require equipment disassembly or disruptions to vacuum chambers, so you can reduce your calibration time by 80% or more.
More accurate and less time-consuming than visual inspection, WaferSense ALS reduces setup time and preventative maintenance downtime by promptly delivering reliable, real-time measurements. Data captured with accompanying software also helps increase semiconductor yield.
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ALS
Thin and light, WaferSense ALS reports tilt in two dimensions. Pitch
and roll display allows quick, accurate |
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ALS2
Even thinner than the ALS at only 6.3mm tall, WaferSense ALS2 can move to more stations automatically. |
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ALSR
WaferSense ALSR provides the same wireless ALS measurement accuracy and convenience in a reticle-like form factor. |
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ALS2 Vertical
In a vertical position, the ALS2 Vertical measures Ion Implant and copper plating angles, enabling tighter XYZ dimensions to compensate for the decrease in junction depths required by device scaling. |