WaferSense™ Technology
Our revolutionary WaferSense family of products offers a wireless set of measurement solutions for leveling, gapping and teaching semiconductor equipment. Why spend hours of manual measuring when WaferSense can deliver accurate, repeatable results in mere minutes?
Each product boasts a wafer-like form factor allowing them to travel like wafers travel, making for easy installation and minimal machine downtime. Because they are wireless, WaferSense products save you time and are easy to use. The wireless feature also allows you to obtain data from locations that are difficult to access otherwise.
With WaferSense, we have designed some of the most precise measurement products available, giving our customers more accurate and more repeatable results. Link WaferSense to your own laptop with our included software and log accurate, immediate feedback. Real-time data logging allows you to establish standards and conduct meaningful data analysis. This highly efficient process can improve system setup and increase long-term yield.
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WaferSense ATS
WaferSense Auto Teaching System (ATS) uses machine vision technology to measure three-dimensional offsets to teach wafer transfer positions. |
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WaferSense AGS
WaferSense Auto Gapping System (AGS) measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. |
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WaferSense ALS and ALSR
WaferSense Auto Leveling System (ALS) captures inclination measurements previously too time-consuming, imprecise or out of reach. Also available in a reticle-like form factor. |
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WaferSense AVS
WaferSense Auto Vibration System (AVS) detects wafer-damaging accelerations and vibrations. |