Wafer Mapping Sensors EX-Q
The EX-Q Wafer Mapping Sensor - A Dramatic Step Forward in Wafer Detection.
Our EX-Q wafer mapping sensor offers quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. This off-the-shelf sensor has ample detection headroom (sensitivity) allowing it to easily detect thin and dark-coated wafers of any size. It also has no moving parts that could result in particulate contamination.
For a Flash demonstration comparing EX-Q performance to through-beam technology, click here.
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Photo Gallery of Wafer Mapping Sensors EX-Q
Features
- EX-Q is available in four standoff distances: 1.5", 2.2", 3.0" and 4.5".
- Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.
- Insensitive to interference from the mapping environment including stray reflections.
- Easy-to-use, off-the-shelf direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.
- Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.
- No moving parts that can result in particulate contamination.
- Detects cross-slotted and ultra-thin wafers.
- Note: Connector is an option and must be specified when ordered.