Press Releases
Take a Peek at What is Making CyberOptics Newsworthy and Noteworthy.
CyberOptics Semiconductor introduces WaferSense Auto Vibration System,
designed to detect wafer-damaging equipment vibrations, November 2007
(ja-JP)
CyberOptics Semiconductor introduces WaferSense AGS200,
designed to significantly improve film deposition, sputter
and etch processing, September 2007
(zh-CN, ko-KR, ja-JP)
CyberOptics Semiconductor Introduces
WaferSense Auto Leveling System 2
Wireless sensor enables greater wafer processing uniformity and real-time feedback
to improve throughput and yield, July 2007
(zh-CN, ko-KR, ja-JP)
CyberOptics Semiconductor introduces WaferSense™ Auto Gapping
System that wirelessly measures gaps critical to semiconductor
processing, July 2007
(zh-CN, ko-KR, ja-JP)
CyberOptics Semiconductor Introduces WaferSense™ Automatic Teaching System that wirelessly teaches wafer transfer positions, January 2007
(zh-CN, zh-MO, ko-KR, ja-JP)
CyberOptics Semiconductor Awarded US Patent for Sensor Product, September 2006
CyberOptics Semiconductor Introduces WaferSense™ Auto Leveling System for Reticles (ALSR) and adds Anodized Option to wafer-like WaferSense ALS, May 2006
(zh-CN, ko-KR, ja-JP)
CyberOptics Semiconductor announces availability of EX-QS Wafer Mapping Sensor, September 2005
Rudolph Technologies selects EX-Q Wafer Mapping Sensor for Use on Metrology tools, March 2005
CyberOptics Semiconductor Introduces WaferSense™ Auto Leveling Sensor, September 2004
Brooks Automation: Growing Profitability in Tough Times, December 2003
CyberOptics Semiconductor Announces the Release of the EX-Q Wafer Mapping Sensor, July 2003
CyberOptics Semiconductor Announces the Release of the EX Series of Wafer Mapping Sensors, May 2002
