Upgrade to the EX-Q for failsafe detection of dark and/or ultra-thin wafers.

If you process dark or thin wafers and you have WX or DD reflective wafer mapping sensors, the EX-Q is an easy upgrade that will deliver the failsafe detection you need.

EX-Q Advantages

• Detects dark and ultra-thin wafers with overall performance as good as or better than through beam
• Detection headroom is sufficient to accommodate future generations of wafer coatings and edge geometries
• Upgrading is straightforward
• Near 100% upgrade success rate