WaferSense® ALS and ALSR
ALS150, ALS200, ALS200A, ALS300, ALS300A, ALSR
Our dedicated team of support engineers is here to answer your specific product and application questions.
Some files may require Adobe Acrobat 8.0 Download Here.
Register your WaferSense Product
| Manuals & Guides | ||
(1,070 KB) |
WaferSense ALS & ALSR User's Guide (Feb 2006) |
|
| Complete ALS Distribution Disk with Drivers | ||
(6.29 MB) |
Updated CD with latest drivers and User's Guide (Jan. 2010) Ver:2.04.008 (ALS 2.2.0 Release) (ReadMe) |
|
| Application Notes | ||
(50 KB) |
ALS AMAT Endura2-Centura2 App Note (Sept 2005) |
|
(50 KB) |
ALS AMAT Endura-Centura App Note (Sept 2005) |
|
(168 KB) |
ALS Mattson SHS App Note (Sept 2005) |
|
(50 KB) |
ALS TELAct8 App Note (Sept 2005) |
|
| Case Studies | ||
(1.3 MB) |
Solving Semiconductor Equipment Leveling Problems and Establishing Process Uniformity Standards (Jun 2006) |
|
| Release Notes | ||
(106 KB) |
ALS1.1 Release Notes (Feb 2006) |
|
| Dimensional Drawings | ||
(129 KB) |
ALS150 Drawing (Feb 2006) |
|
(133 KB) |
ALS200 Drawing (Feb 2006) |
|
(537 KB) |
ALS300 Drawing (Feb 2006) |
|